Source: Proceedings of SPIE. Conference titles: Micromachining Technology for Micro-Optics and Nano-Optics. Unidades: EESC, EP
Subjects: ÓPTICA ELETRÔNICA, MICROELETRÔNICA
ABNT
GONÇALVES NETO, Luiz et al. Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates. Proceedings of SPIE. Bellingham: Escola de Engenharia de São Carlos, Universidade de São Paulo. . Acesso em: 24 abr. 2024. , 2003APA
Gonçalves Neto, L., Cirino, G. A., Mansano, R. D., Cardona, P. S. P., & Verdonck, P. B. (2003). Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates. Proceedings of SPIE. Bellingham: Escola de Engenharia de São Carlos, Universidade de São Paulo.NLM
Gonçalves Neto L, Cirino GA, Mansano RD, Cardona PSP, Verdonck PB. Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates. Proceedings of SPIE. 2003 ; 4984 18-28.[citado 2024 abr. 24 ]Vancouver
Gonçalves Neto L, Cirino GA, Mansano RD, Cardona PSP, Verdonck PB. Hybrid phase and amplitude modulation proximity printing mask fabricated on DLC and 'SIO IND. 2' substrates. Proceedings of SPIE. 2003 ; 4984 18-28.[citado 2024 abr. 24 ]