On the importance of atom probe tomography for the development of new nanoscale devices (2022)
Conference titles: Symposium on Microelectronics Technology and Devices (SBMicro). Unidade: IFSubjects: TOMOGRAFIA, SEMICONDUTORES
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SANTOS, Thales Borrely dos et al. On the importance of atom probe tomography for the development of new nanoscale devices. 2022, Anais.. New York: IEEE, 2022. Disponível em: https://doi.org/10.1109/SBMICRO55822.2022.9881039. Acesso em: 04 out. 2024.APA
Santos, T. B. dos, Huang, T. -Y., Yang, Y. -C., Goldman, R. S., & Quivy, A. A. (2022). On the importance of atom probe tomography for the development of new nanoscale devices. In . New York: IEEE. doi:10.1109/SBMICRO55822.2022.9881039NLM
Santos TB dos, Huang T-Y, Yang Y-C, Goldman RS, Quivy AA. On the importance of atom probe tomography for the development of new nanoscale devices [Internet]. 2022 ;[citado 2024 out. 04 ] Available from: https://doi.org/10.1109/SBMICRO55822.2022.9881039Vancouver
Santos TB dos, Huang T-Y, Yang Y-C, Goldman RS, Quivy AA. On the importance of atom probe tomography for the development of new nanoscale devices [Internet]. 2022 ;[citado 2024 out. 04 ] Available from: https://doi.org/10.1109/SBMICRO55822.2022.9881039