Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films (2020)
Source: SN Applied Sciences. Unidade: EP
Subjects: MICROSCÓPIO ELETRÔNICO, FILMES FINOS, MATERIAIS
ABNT
SILVA, Felipe Carneiro da; TUNES, Matheus A; EDMONDSON, Philip D.; et al. Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films. SN Applied Sciences, Switzerland, v. 2, 2020. DOI: 10.1007/s42452-020-2617-3.APA
Silva, F. C. da, Tunes, M. A., Edmondson, P. D., Lima, N. B., Sagás, J. C., Fontana, L. C., & Schön, C. G. (2020). Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films. SN Applied Sciences, 2. doi:10.1007/s42452-020-2617-3NLM
Silva FC da, Tunes MA, Edmondson PD, Lima NB, Sagás JC, Fontana LC, Schön CG. Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films. SN Applied Sciences. 2020 ;2Vancouver
Silva FC da, Tunes MA, Edmondson PD, Lima NB, Sagás JC, Fontana LC, Schön CG. Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films. SN Applied Sciences. 2020 ;2