Design and characterization of an RF plasma cleaner (2010)
Source: Brazilian Journal of Physics. Unidade: IF
Assunto: FÍSICA DE PLASMAS
ABNT
CANAL, G P et al. Design and characterization of an RF plasma cleaner. Brazilian Journal of Physics, v. 40, n. 1, p. 108-114, 2010Tradução . . Disponível em: https://doi.org/10.1590/s0103-97332010000100015. Acesso em: 11 jun. 2024.APA
Canal, G. P., Luna, H., Ruchko, L. F., & Galvao, R. M. O. (2010). Design and characterization of an RF plasma cleaner. Brazilian Journal of Physics, 40( 1), 108-114. doi:https://doi.org/10.1590/S0103-97332010000100015NLM
Canal GP, Luna H, Ruchko LF, Galvao RMO. Design and characterization of an RF plasma cleaner [Internet]. Brazilian Journal of Physics. 2010 ; 40( 1): 108-114.[citado 2024 jun. 11 ] Available from: https://doi.org/10.1590/s0103-97332010000100015Vancouver
Canal GP, Luna H, Ruchko LF, Galvao RMO. Design and characterization of an RF plasma cleaner [Internet]. Brazilian Journal of Physics. 2010 ; 40( 1): 108-114.[citado 2024 jun. 11 ] Available from: https://doi.org/10.1590/s0103-97332010000100015