Al-doped ZnO thin films via sputtering: influence of structural defects on ozone gas sensitivity (2024)
- Authors:
- USP affiliated authors: BERNARDI, MARIA INES BASSO - IFSC ; MASTELARO, VALMOR ROBERTO - IFSC ; LEITE, RAMON RESENDE - EESC ; DIAZ, JULIO CESAR CAMILO ALBORNOZ - IFSC ; KOMORIZONO, AMANDA AKEMY - EESC
- Unidades: IFSC; EESC
- DOI: 10.1590/1980-5373-MR-2024-0184
- Subjects: MATERIAIS NANOESTRUTURADOS; SENSOR; ÓPTICA; MATÉRIA CONDENSADA; MATERIAIS
- Keywords: ZnO; Ceramic targets; Sputtering; Thin flms; Sensors; Ozone
- Agências de fomento:
- Language: Inglês
- Imprenta:
- Publisher place: São Carlos
- Date published: 2024
- Source:
- Título: Materials Research
- ISSN: 1516-1439
- Volume/Número/Paginação/Ano: v. 27, suppl. 2, p. e20240184-1-e20240184-15, 2024
- Este periódico é de acesso aberto
- Este artigo é de acesso aberto
- URL de acesso aberto
- Cor do Acesso Aberto: gold
- Licença: cc-by
-
ABNT
SALES, Douglas Henrique et al. Al-doped ZnO thin films via sputtering: influence of structural defects on ozone gas sensitivity. Materials Research, v. 27, p. e20240184-1-e20240184-15, 2024Tradução . . Disponível em: https://doi.org/10.1590/1980-5373-MR-2024-0184. Acesso em: 28 dez. 2025. -
APA
Sales, D. H., Leite, R. R., Diaz, J. C. C. A., Komorizono, A. A., Bernardi, M. I. B., Mastelaro, V. R., et al. (2024). Al-doped ZnO thin films via sputtering: influence of structural defects on ozone gas sensitivity. Materials Research, 27, e20240184-1-e20240184-15. doi:10.1590/1980-5373-MR-2024-0184 -
NLM
Sales DH, Leite RR, Diaz JCCA, Komorizono AA, Bernardi MIB, Mastelaro VR, Longo E, Teixeira SR, Souza AE de. Al-doped ZnO thin films via sputtering: influence of structural defects on ozone gas sensitivity [Internet]. Materials Research. 2024 ; 27 e20240184-1-e20240184-15.[citado 2025 dez. 28 ] Available from: https://doi.org/10.1590/1980-5373-MR-2024-0184 -
Vancouver
Sales DH, Leite RR, Diaz JCCA, Komorizono AA, Bernardi MIB, Mastelaro VR, Longo E, Teixeira SR, Souza AE de. Al-doped ZnO thin films via sputtering: influence of structural defects on ozone gas sensitivity [Internet]. Materials Research. 2024 ; 27 e20240184-1-e20240184-15.[citado 2025 dez. 28 ] Available from: https://doi.org/10.1590/1980-5373-MR-2024-0184 - In2O3 octahedral structures: effect of particle size and oxygen vacancy concentration on O3 and CO gas-sensing performance
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Informações sobre o DOI: 10.1590/1980-5373-MR-2024-0184 (Fonte: oaDOI API)
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