Reactive sputter magnetron reactor for preparation of thin films and simultaneous in-situ structural study by X-ray diffraction

Reactive sputter magnetron reactor for preparation of thin films and simultaneous in-situ structural study by X-ray diffraction (2013)

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ABNT

FEUGEAS J N,; BÜRGI, J; J GARCIA MOLLEJAA. F. CRAIEVICH3 , Kellermann; et al. Reactive sputter magnetron reactor for preparation of thin films and simultaneous in-situ structural study by X-ray diffraction. Anais.. Campinas: [s.n.], 2013.
APA

Feugeas J N,, Bürgi, J., J Garcia MollejaA. F. Craievich3 , K., Craievich, A. F., Kellermann, G., & Neueschwander, R. (2013). Reactive sputter magnetron reactor for preparation of thin films and simultaneous in-situ structural study by X-ray diffraction. In . Campinas.
NLM

Feugeas J N, Bürgi J, J Garcia MollejaA. F. Craievich3 K, Craievich AF, Kellermann G, Neueschwander R. Reactive sputter magnetron reactor for preparation of thin films and simultaneous in-situ structural study by X-ray diffraction. 2013 ;
Vancouver

Feugeas J N, Bürgi J, J Garcia MollejaA. F. Craievich3 K, Craievich AF, Kellermann G, Neueschwander R. Reactive sputter magnetron reactor for preparation of thin films and simultaneous in-situ structural study by X-ray diffraction. 2013 ;