Diffractive optical element applied to proximity exposure lithography exploring partial light coherence (2010)
- Authors:
- USP affiliated authors: MANSANO, RONALDO DOMINGUES - EP ; GONCALVES NETO, LUIZ - EESC
- Unidades: EP; EESC
- Subjects: DIFRAÇÃO DA LUZ; ANÁLISE ÓTICA
- Language: Inglês
- Imprenta:
- Publisher: Optical Society of America
- Publisher place: Washington
- Date published: 2010
- ISBN: 9781557529039
- Conference titles: Latin America Optics & Photonics Conference
-
ABNT
CIRINO, Giuseppe Antonio et al. Diffractive optical element applied to proximity exposure lithography exploring partial light coherence. 2010, Anais.. Washington: Optical Society of America, 2010. . Acesso em: 06 out. 2024. -
APA
Cirino, G. A., Mansano, R. D., Verdonck, P. B., & Gonçalves Neto, L. (2010). Diffractive optical element applied to proximity exposure lithography exploring partial light coherence. In . Washington: Optical Society of America. -
NLM
Cirino GA, Mansano RD, Verdonck PB, Gonçalves Neto L. Diffractive optical element applied to proximity exposure lithography exploring partial light coherence. 2010 ;[citado 2024 out. 06 ] -
Vancouver
Cirino GA, Mansano RD, Verdonck PB, Gonçalves Neto L. Diffractive optical element applied to proximity exposure lithography exploring partial light coherence. 2010 ;[citado 2024 out. 06 ] - Digital holography: computer-generated holograms and diffractive optics in scalar diffraction domain
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