Micromechanical structures development for chemical analysis: study of the porous silicon as adsorbent (1999)
- Authors:
- USP affiliated authors: GALEAZZO, ELISABETE - EP ; SILVA, MARIA LUCIA PEREIRA DA - EP ; FURLAN, ROGERIO - EP ; FERNANDEZ, FRANCISCO JAVIER RAMIREZ - EP
- School: EP
- Subject: SENSORES ELETROMECÂNICOS
- Language: Inglês
- Imprenta:
- Place of publication: Bellingham
- Date published: 1999
- Source:
- Título do periódico: Proceedings of SPIE
- Volume/Número/Paginação/Ano: v. 3891, p. 376-394, 1999
- Conference title: Electronics and Structures for MENS
-
ABNT
SOUZA, Silvana Gasparotto de et al. Micromechanical structures development for chemical analysis: study of the porous silicon as adsorbent. Proceedings of SPIE. Bellingham: Escola Politécnica, Universidade de São Paulo. . Acesso em: 03 jul. 2022. , 1999 -
APA
Souza, S. G. de, Galeazzo, E., Silva, M. L. P. da, Furlan, R., & Ramírez Fernandez, F. J. (1999). Micromechanical structures development for chemical analysis: study of the porous silicon as adsorbent. Proceedings of SPIE. Bellingham: Escola Politécnica, Universidade de São Paulo. -
NLM
Souza SG de, Galeazzo E, Silva MLP da, Furlan R, Ramírez Fernandez FJ. Micromechanical structures development for chemical analysis: study of the porous silicon as adsorbent. Proceedings of SPIE. 1999 ; 3891 376-394.[citado 2022 jul. 03 ] -
Vancouver
Souza SG de, Galeazzo E, Silva MLP da, Furlan R, Ramírez Fernandez FJ. Micromechanical structures development for chemical analysis: study of the porous silicon as adsorbent. Proceedings of SPIE. 1999 ; 3891 376-394.[citado 2022 jul. 03 ] - Micromechanical structures development to concentrate hydrocarbons from air
- Silicon micromechanical structures fabricated by electrochemical process
- Magneto-sensor diferencial
- Analysis of porous silicon devices for gas sensors
- The influence of chemical species on photoluminescence of porous silicon. (em CD-Rom)
- Sensor magnetico em cascata na tecnologia cmos
- Silicon porous as photo conductive material
- Caracterizacao da estrutura do silicio poroso
- Porous silicon masking by silicon oxide and hydrogen ion implantation
- Sensibilidade versus linearizacao em sensores de campo magnetico integraveis
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