Micromechanical structures development for chemical analysis: study of the porous silicon as adsorbent

Micromechanical structures development for chemical analysis: study of the porous silicon as adsorbent (1999)

Authors:
USP affiliated authors: GALEAZZO, ELISABETE - EP ; SILVA, MARIA LUCIA PEREIRA DA - EP ; FURLAN, ROGERIO - EP ; FERNANDEZ, FRANCISCO JAVIER RAMIREZ - EP
Unidade: EP
Assunto: SENSORES ELETROMECÂNICOS
Language: Inglês
Imprenta:
- Publisher place: Bellingham
- Date published: 1999
Source:
- Título do periódico: Proceedings of SPIE
- Volume/Número/Paginação/Ano: v. 3891, p. 376-394, 1999
Conference titles: Apresentado ao Electronics and Structures for MENS

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ABNT

SOUZA, S. G.; GALEAZZO, Elisabete; SILVA, Maria Lucia Pereira da; FURLAN, Rogério; RAMÍREZ FERNANDEZ, Francisco Javier. Micromechanical structures development for chemical analysis: study of the porous silicon as adsorbent. Proceedings of SPIE[S.l: s.n.], 1999.
APA

Souza, S. G., Galeazzo, E., Silva, M. L. P. da, Furlan, R., & Ramírez Fernandez, F. J. (1999). Micromechanical structures development for chemical analysis: study of the porous silicon as adsorbent. Proceedings of SPIE. Bellingham.
NLM

Souza SG, Galeazzo E, Silva MLP da, Furlan R, Ramírez Fernandez FJ. Micromechanical structures development for chemical analysis: study of the porous silicon as adsorbent. Proceedings of SPIE. 1999 ; 3891 376-394.
Vancouver

Souza SG, Galeazzo E, Silva MLP da, Furlan R, Ramírez Fernandez FJ. Micromechanical structures development for chemical analysis: study of the porous silicon as adsorbent. Proceedings of SPIE. 1999 ; 3891 376-394.