Dopant redistribution during the formation of cobal silicide using two thermal stages (1997)
- Authors:
- Autor USP: FURLAN, ROGERIO - EP
- Unidade: EP
- Assunto: REDES DE COMPUTADORES
- Language: Inglês
- Imprenta:
- Source:
- Título: Proceedings
- Conference titles: International VLSI Multilevel Interconnection Conference - VMIC
-
ABNT
SIMÕES, Eliphas Wagner e FURLAN, Rogério e SANTIAGO-AVILÉS, Jorge Juan. Dopant redistribution during the formation of cobal silicide using two thermal stages. 1997, Anais.. Tampa: VMIC, 1997. . Acesso em: 27 dez. 2025. -
APA
Simões, E. W., Furlan, R., & Santiago-Avilés, J. J. (1997). Dopant redistribution during the formation of cobal silicide using two thermal stages. In Proceedings. Tampa: VMIC. -
NLM
Simões EW, Furlan R, Santiago-Avilés JJ. Dopant redistribution during the formation of cobal silicide using two thermal stages. Proceedings. 1997 ;[citado 2025 dez. 27 ] -
Vancouver
Simões EW, Furlan R, Santiago-Avilés JJ. Dopant redistribution during the formation of cobal silicide using two thermal stages. Proceedings. 1997 ;[citado 2025 dez. 27 ] - Microfluidics
- Development of a flow microsensor built on silicon
- Microsensor for liquid flow measurements
- Development of an electrochemical sensor based on silicon technology. (em CD-Rom)
- Estudo da formação e das caraterísticas de contatos 'AL'/'TI'w/'TI''SI IND.2' sobre junções rasas com aplicação da técnica AES
- Thermodynamic interaction in 'CO'-'SI'-'AS' and 'CO'-'SI'-b systems
- Estudo da formacao do disiliceto de cobalto em duas etapas termicas
- Controlled choked flow in microfluidic devices
- Fabrication of freestanding polysilicon thermal filaments
- Computational two-dimensional finite-element analysis of flow behavior inside microfluidic amplifiers
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