Aspects of fabrication and characterization of electro-thermal micro actuators (2005)
- Authors:
- Autor USP: SILVA, EMILIO CARLOS NELLI - EP
- Unidade: EP
- Subjects: TERMOELETRICIDADE; SISTEMAS MICROELETROMECÂNICOS; MÉTODO DOS ELEMENTOS FINITOS
- Language: Inglês
- Imprenta:
- Publisher: ABCM
- Publisher place: Rio de Janeiro
- Date published: 2005
- Source:
- Título do periódico: COBEM 2005 : proceedings
- Conference titles: International Congress of Mechanical Engineering
-
ABNT
GODOY, Paulo Henrique de e SILVA, Emílio Carlos Nelli. Aspects of fabrication and characterization of electro-thermal micro actuators. 2005, Anais.. Rio de Janeiro: ABCM, 2005. Disponível em: https://repositorio.usp.br/directbitstream/1c48bca9-3669-450c-8685-c71aa3606f8b/Silva_E-2005-Aspects%20of%20Fabrication%20and%20Characterization%20of%20electro-thermal%20micro%20actuators.pdf. Acesso em: 19 set. 2024. -
APA
Godoy, P. H. de, & Silva, E. C. N. (2005). Aspects of fabrication and characterization of electro-thermal micro actuators. In COBEM 2005 : proceedings. Rio de Janeiro: ABCM. Recuperado de https://repositorio.usp.br/directbitstream/1c48bca9-3669-450c-8685-c71aa3606f8b/Silva_E-2005-Aspects%20of%20Fabrication%20and%20Characterization%20of%20electro-thermal%20micro%20actuators.pdf -
NLM
Godoy PH de, Silva ECN. Aspects of fabrication and characterization of electro-thermal micro actuators [Internet]. COBEM 2005 : proceedings. 2005 ;[citado 2024 set. 19 ] Available from: https://repositorio.usp.br/directbitstream/1c48bca9-3669-450c-8685-c71aa3606f8b/Silva_E-2005-Aspects%20of%20Fabrication%20and%20Characterization%20of%20electro-thermal%20micro%20actuators.pdf -
Vancouver
Godoy PH de, Silva ECN. Aspects of fabrication and characterization of electro-thermal micro actuators [Internet]. COBEM 2005 : proceedings. 2005 ;[citado 2024 set. 19 ] Available from: https://repositorio.usp.br/directbitstream/1c48bca9-3669-450c-8685-c71aa3606f8b/Silva_E-2005-Aspects%20of%20Fabrication%20and%20Characterization%20of%20electro-thermal%20micro%20actuators.pdf - Structural design of high-performance capacitive accelerometers using parametric optimization with uncertainties
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