Integrated sensors and microsystems (2004)
- Authors:
- USP affiliated authors: FERNANDEZ, FRANCISCO JAVIER RAMÍREZ - EP ; SALCEDO, WALTER JAIMES - EP ; GALEAZZO, ELISABETE - EP ; PERES, HENRIQUE ESTANISLAU MALDONADO - EP
- Unidade: EP
- Assunto: NANOTECNOLOGIA
- Language: Inglês
- Imprenta:
- Source:
- Título do periódico: NanoSemiMat-3.
- Conference titles: Workshop on Semiconductor Nanodevices and Nanostructured Materials
-
ABNT
RAMÍREZ FERNANDEZ, Francisco Javier et al. Integrated sensors and microsystems. 2004, Anais.. Brasília: MCT, 2004. . Acesso em: 23 abr. 2024. -
APA
Ramírez Fernandez, F. J., Salcedo, W. J., Galeazzo, E., & Peres, H. E. M. (2004). Integrated sensors and microsystems. In NanoSemiMat-3.. Brasília: MCT. -
NLM
Ramírez Fernandez FJ, Salcedo WJ, Galeazzo E, Peres HEM. Integrated sensors and microsystems. NanoSemiMat-3. 2004 ;[citado 2024 abr. 23 ] -
Vancouver
Ramírez Fernandez FJ, Salcedo WJ, Galeazzo E, Peres HEM. Integrated sensors and microsystems. NanoSemiMat-3. 2004 ;[citado 2024 abr. 23 ] - Porous silicon for gas sensor applications
- Silicon field-emission devices fabricated using the hydrogen implantation-porous silicon (HI-PS) micromachining technique
- Porous silicon sacrifical layers applied on micromechanical structures fabrication
- Novel Si field emission devices fabrication method based on HI-PS technique for gas sensors development
- Dispositivos de teste da implantacao ionica de j2
- Gas sensitive porous silicon devices: responses to organic vapors
- Porous silicon processing for enhancing thin silicon membranes fabrication
- Porous silicon processing for enhancing thin silicon membranes fabrication
- Silicon micromechanical structures fabricated by electrochemical process
- Contribuicao a caracterizacao da formacao de silicio poroso por tecnicas de gravimetria
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