The influence of nitrogen on the dielectric constant and surface hardness in diamond-like carbon (DLC) films (2004)
- Autores:
- Autores USP: MANSANO, RONALDO DOMINGUES - EP ; VERDONCK, PATRICK BERNARD - EP ; MACIEL, HOMERO SANTIAGO - EP
- Unidade: EP
- DOI: 10.1016/j.diamond.2003.10.016
- Assunto: FILMES FINOS
- Idioma: Inglês
- Imprenta:
- Fonte:
- Título do periódico: Diamond and Related Materials,
- ISSN: 0925-9635
- Volume/Número/Paginação/Ano: v. 13, n. 2, p. 316-319, Feb. 2004.
- Este periódico é de assinatura
- Este artigo NÃO é de acesso aberto
- Cor do Acesso Aberto: closed
-
ABNT
GUERINO, M. et al. The influence of nitrogen on the dielectric constant and surface hardness in diamond-like carbon (DLC) films. Diamond and Related Materials, v. 13, n. 2, p. 316-319, 2004Tradução . . Disponível em: https://doi.org/10.1016/j.diamond.2003.10.016. Acesso em: 24 abr. 2024. -
APA
Guerino, M., Massi, M., Maciel, H. S., Otani, C., Mansano, R. D., Verdonck, P. B., & Libardi, J. (2004). The influence of nitrogen on the dielectric constant and surface hardness in diamond-like carbon (DLC) films. Diamond and Related Materials,, 13( 2), 316-319. doi:10.1016/j.diamond.2003.10.016 -
NLM
Guerino M, Massi M, Maciel HS, Otani C, Mansano RD, Verdonck PB, Libardi J. The influence of nitrogen on the dielectric constant and surface hardness in diamond-like carbon (DLC) films [Internet]. Diamond and Related Materials,. 2004 ; 13( 2): 316-319.[citado 2024 abr. 24 ] Available from: https://doi.org/10.1016/j.diamond.2003.10.016 -
Vancouver
Guerino M, Massi M, Maciel HS, Otani C, Mansano RD, Verdonck PB, Libardi J. The influence of nitrogen on the dielectric constant and surface hardness in diamond-like carbon (DLC) films [Internet]. Diamond and Related Materials,. 2004 ; 13( 2): 316-319.[citado 2024 abr. 24 ] Available from: https://doi.org/10.1016/j.diamond.2003.10.016 - Silicon wall profiles generated by isotropic dry etching process
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Informações sobre o DOI: 10.1016/j.diamond.2003.10.016 (Fonte: oaDOI API)
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