Controlled motion in microbridges of silicon carbide obtained by PECVD (2004)
Rehder, Gustavo Pamplona 
; Paez Carreño, Marcelo Nelson
Fonte: Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03. Nome do evento: International Symposium on Microelectronics Technology and Devices SBMICRO 2004. Unidade: EP
Assuntos: MICROELETRÔNICA, FILMES FINOS, ELETROQUÍMICA
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REHDER, Gustavo Pamplona e PAEZ CARREÑO, Marcelo Nelson. Controlled motion in microbridges of silicon carbide obtained by PECVD. 2004, Anais.. Pennington: The Electrochemical Society, 2004. . Acesso em: 22 nov. 2025.APA
Rehder, G. P., & Paez Carreño, M. N. (2004). Controlled motion in microbridges of silicon carbide obtained by PECVD. In Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03. Pennington: The Electrochemical Society.NLM
Rehder GP, Paez Carreño MN. Controlled motion in microbridges of silicon carbide obtained by PECVD. Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03. 2004 ;[citado 2025 nov. 22 ]Vancouver
Rehder GP, Paez Carreño MN. Controlled motion in microbridges of silicon carbide obtained by PECVD. Microelectronics Technology and Devices SBMicro 2004. Proceedings, v. 2004-03. 2004 ;[citado 2025 nov. 22 ]
