Rapid titanium silicidation: a comparative study of two RTA reactorS (1993)
Bariatto, M; Fontes, A; Acquadro Quacchia, Juan Carlos; Furlan, Rogério 
; Santiago-Avilés, Jorge Juan
Fonte: Rapid Thermal and Integrated Processing Ii. Nome do evento: Symposium on Rapid Thermal and Integrated Processing. Unidade: EP
Assunto: CIRCUITOS INTEGRADOS
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ABNT
BARIATTO, M et al. Rapid titanium silicidation: a comparative study of two RTA reactorS. 1993, Anais.. Pittsburgh: Materials Research Society, 1993. . Acesso em: 17 nov. 2025.APA
Bariatto, M., Fontes, A., Acquadro Quacchia, J. C., Furlan, R., & Santiago-Avilés, J. J. (1993). Rapid titanium silicidation: a comparative study of two RTA reactorS. In Rapid Thermal and Integrated Processing Ii. Pittsburgh: Materials Research Society.NLM
Bariatto M, Fontes A, Acquadro Quacchia JC, Furlan R, Santiago-Avilés JJ. Rapid titanium silicidation: a comparative study of two RTA reactorS. Rapid Thermal and Integrated Processing Ii. 1993 ;[citado 2025 nov. 17 ]Vancouver
Bariatto M, Fontes A, Acquadro Quacchia JC, Furlan R, Santiago-Avilés JJ. Rapid titanium silicidation: a comparative study of two RTA reactorS. Rapid Thermal and Integrated Processing Ii. 1993 ;[citado 2025 nov. 17 ]
